The KOFLOC Model 3660 Series High-Precision Mass Flow Controller (Detailed Configuration: 3660-V/D0W-AIR-2SLM-20 degree) is 100% engineered, assembled, and calibrated in Japan by KOFLOC Corp. (Kojima Instruments Inc.) – an internationally recognized technological benchmark with more than 75 years of specialized innovation in micro-flow fluidics and analytical control instrumentation. Serving as KOFLOC’s premier and most widely deployed standard Mass Flow Controller (MFC), the Model 3660 resolves the operational limitations of conventional manual needle valves and rotameters by delivering high-speed, automated, and closed-loop gas mass flow regulation unaffected by fluctuating supply pressures and environmental thermal shifts.

The technological excellence of the KOFLOC Model 3660 resides in its unified, high-integrity integration of an advanced capillary thermal mass flow sensor with a fast-acting proportional solenoid control valve (normally closed configuration for failsafe operation). The thermal sensor detects the heat transfer from gas molecules traveling through the sensor tube, providing direct mass measurement without requiring external pressure or temperature transmitters. An integrated closed-loop electronic servo controller dynamically compares this sensed flow against the incoming command setpoint (0.01 to 5 VDC), continuously modulating valve stroke displacement to achieve stable flow stabilization within 2 seconds at an exceptional accuracy of ±1.0% F.S. (at 25 °C) and repeatability of ±0.5% F.S. across a 2% to 100% control envelope.

This specific unit is factory calibrated for clean dry air (AIR) across a 2 SLM (Standard Liters per Minute, equivalent to 2,000 SCCM) full-scale measuring range referenced to 20 °C and 1 atmosphere (101.325 kPa). Constructed with high-grade SUS316/SUS316L stainless-steel wetted components and sealed with Viton (FKM) and Teflon (PTFE) elastomers, the controller withstands operating pressures up to 500 kPa and proof pressures up to 980 kPa (approx. 10 bar), maintaining ultra-high vacuum leak integrity of ≤ 1 × 10^-8 Pa·m³/s He. Equipped with an industry-standard SEMI compliant D-sub 9-pin connector and 1/4" double-ferrule compression fittings, the KOFLOC 3660 is an indispensable fluid control asset for gas chromatography instruments, biotechnology bioreactors, semiconductor processing tools, and analytical laboratory manifolds worldwide.

• Manufacturer: KOFLOC Corp. (Kojima Instruments Inc.)
• Origin: 100% Japan (Kyoto, Japan)
• Product Series: High-Precision Standard Thermal Mass Flow Controller (MFC)
• Complete Model Code: 3660-V/D0W-AIR-2SLM-20 degree (3660-V/D0W-AIR-2SLM-20C)
• Base Series: Model 3660 Series
• Sensing Architecture: Capillary thermal mass flow sensor (temperature-difference detection)
• Valve Mechanism: High-reliability proportional solenoid actuator valve (Normally-Closed configuration)
• Calibrated Process Fluid: Clean compressed air / Dry air (AIR)
• Rated Full-Scale Flow Capacity: 2 SLM (Standard Liters per Minute = 2,000 mL/min / 2,000 SCCM)
• Standard Reference Temperature: 20 °C at 1 atm (101.325 kPa)
• Flow Control Accuracy: Within ±1.0% F.S. (at 25 °C)
• Measurement Repeatability: Within ±0.5% F.S.
• Flow Control Dynamic Range: 2% to 100% of Full Scale
• Settling / Response Time: ≤ 2.0 seconds (settling within ±2% of setpoint, 98% F.S.)
• Operating Differential Pressure: 50 kPa to 300 kPa (G)
• Allowable Operating Pressure: 500 kPa (G) or less
• Proof Pressure Resistance: 980 kPa (G) (approx. 1.0 MPa / 145 psi)
• Helium Leak Integrity: ≤ 1 × 10^-8 Pa·m³/s He
• Command Input Signal (Flow Setpoint): 0.01 to 5 VDC (Input impedance ≥ 1 MΩ; valve fully closed at setting input of ≤ 2% F.S.)
• Output Feedback Signal: 0 to 5 VDC linear voltage (External load resistance ≥ 250 kΩ)
• Electrical Interface: D-sub 9-pin Male connector (SEMI standard pin arrangement, KFC standard compliant)
• Process Fitting Connections: 1/4" SWL (Double-Ferrule Lok Compression Tube Fittings)
• Wetted Materials:
  - Body & Internal Flow Passage: SUS316 / SUS316L Stainless Steel
  - Valve Seat & Sealing O-rings: FKM (Viton) / PTFE (Teflon)
• Operating Ambient Temperature: 5 °C to 45 °C (Accuracy guaranteed within 15 °C to 35 °C)
• Operating Ambient Humidity: 10% to 90% RH (No condensation allowed)
• Power Supply Requirements: Dual supply +15 VDC (±5%) 100 mA, -15 VDC (±5%) 250 mA
• Net Weight: Approx. 1,000 g (Heavy-duty EMI-shielded metal construction)
• Certifications: CE marked, RoHS directive compliant, factory pre-calibrated with traceable test inspection sheet
• Applicable Industries & Systems: Gas chromatography (GC) and environmental monitoring equipment, biotechnology and pharmaceutical bioreactors, semiconductor and solar wafer manufacturing (CVD/PVD), industrial furnace atmosphere control, analytical gas mixing test rigs, and automated industrial gas process lines.